Raith, the global leading manufacturer of nanofabrication instrumentation, has delivered its VELION system to the Center for Materials and Microsystems of FBK – Fondazione Bruno Kessler in Trento, Italy, a research institute that aims at results of excellence in science and technology with particular emphasis on interdisciplinary approaches and their applicative dimension.
Advanced and novel integration of nanotechnological solutions
The VELION is a Focused Ion Beam (FIB)-centric FIB/SEM system for sophisticated nanofabrication applications on a lithography platform. Its FIB column is vertically mounted in order to keep the FIB permanently targeted at the laser interferometer stage. This ensures highest precision for complex nanofabrication tasks. The high-resolution field emission SEM is side-mounted to serve in-situ process control, sample preparation, and inspection as well as complementary electron beam lithography (EBL).
”The VELION is a key instrument for the strategic investment that FBK is undertaking to significantly enhance its capabilities. It also strengthens its role as national reference point for key enabling technologies. This FIB system will enable us to implement advanced and novel integration of nanotechnological solutions on our traditional platforms. This will boost our offer for frontier research activities as well as for innovative industrial products. Beside this, due to its characteristics, we will intensively use VELION for our research in the strategic field of quantum technology,” says Prof Gianluigi Casse, Director of the Center for Materials and Microsystems in FBK.
Unique nanofabrication instrument for applications at highest resolution
“The VELION has been recognized in the community as a unique FIB-centric nanofabrication instrument for challenging applications across large areas at highest resolution. The research community at FBK will be taking full advantage of the device's potential to enhance research in the area of nanostructure surfaces such as plasmonics or photonics, with this novel instrument concept. We are proud to deliver a VELION to FBK and are already looking forward to the first results,” says Torsten Richter, Product Manager at Raith.
Contact: Raith GmbH