MEMS infrared emitters for gas analysis

Modern and precise gas sensors are based on the NDIR concept, where broad bandwidth infrared light sources are needed to detect the gas-specific light absorption within the IR. The change from classical light bulbs to micro electro mechanical solutions (MEMS) offers a series of advantages.

MEMS IR emitters are ideally suited for mobile sensor solutions and stationary applications

On the one hand these MEMS emitters are by far smaller and more shock resistant, which makes optical and mechanical integration into the sensor system easier. On the other hand these IR sources need significant less power and are considerably faster when turning on and off – an important aspect for sensors with good signal to noise ratio. These facts make MEMS IR emitters the first choice for mobile sensor solutions as well for stationary applications with high requirements, like breath analysis, process or environmental monitoring.

The CiS Research Institute develops and manufactures such MEMS IR emitters for different customer specific applications. Beside different geometries and power classes, the CiS offers innovative solutions for emitters with higher dynamics, improved emissivity and long lifetimes in the application. In addition, different solutions for infrared detectors, services for housing, hermetic sealing and assembly and integration in the sensor systems of customers and development partners are offered.
 
Contact: Dr. Martin Schaedel, CiS Forschungsinstitut für Mikrosensorik GmbH
mschaedel@cismst.de