ContourGT InMotion 3D optical microscope enhanced capability for device motion analyses

The ContourGT InMotion 3D optical microscope provides the most reliable and detailed surface characterization of dynamic MEMS and other micro-devices in operation. Utilizing white light interferometry, the ContourGT InMotion performs three-dimensional surface measurements of features from 0.1nm to 10mm in height for devices as they actuate. The system integrates a proprietary stroboscopic technology and powerful data acquisition and Vision analysis software to deliver simultaneous static and dynamic device measurements for frequencies from 11Hz to 2.4MHz on a single system.
With ContourGT InMotion researchers and manufacturers can characterize resonant frequency, measure shape distortion and, deflection, surface roughness, step heights and critical dimensions on wide variety of topographic features for detailed failure analyses for improving device quality control and yield. For more information, visit http://www.bruker-axs.com/contourgt-inmotion-3d-optical-microscope.html.

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