Detecting the direction of incident light

The CiS Research Institute has developed a tiny microchip for the determination of the direction of incident light. The small design and the easy integration as well as the cost-saving MEMS manufacturing technology suitable for mass production characterize the new component. The monolithic sensor is based on four integrated photodiodes in a 3D-structured silicon substrate.

Sensors for detecting the angle of incidence of light are known e.g. from tracking systems of photovoltaic plants. They are used to increase energy efficiency. Typically, they consist of several, discrete electronics and optical components and their assembly is complex. Caused by manufacturing, these hybrid constructions are relatively large and their performance parameters have a high spreading width.

The new RISEQ sensor technology from the CiS Research Institute enables the development and production of monolithically integrated, direction-sensitive sensors. The light direction can be determined to a few degrees. The technical concept is based on the integration of four photodiodes in the walls of a cavity in the silicon. Depending on the design, the size of the entire sensor module can be less than 1 mm³. The monolithic design of the sensor proves to be insensitive to shocks. The RISEQ sensor technology enables low design and manufacturing costs and minimal component scattering as well as high reproducibility and constancy of the electrical parameters.

With these characteristics, RISEQ sensors are attractive for all applications that require a precise directional determination of an incident light beam. Examples include the control of modern lighting technology, the beam guidance in laser technology, the control of smart displays, applications in building automation, climate control and automotive safety. The research and development work in the RISEQ project was funded by the German Federal Ministry of Economics and Energy.

Contact: Uta Neuhaus, CiS Forschungsinstitut für Mikrosensorik GmbH
uneuhaus@cismst.de