Feb 18, 2016

Improved photo-sensitive FOTURAN II material for use in biotech and MEMS applications

Four processing steps of FOTURAN II (from left to right): UV exposure, tempering, etching, ceramization
Source: SCHOTT
Feb 18, 2016
SCHOTT now offers a new, significantly improved photo-sensitive glass, FOTURAN II, which is based on the well-known FOTURAN. It can be structured and processed in three steps to create structures down to µm level. UV exposure and temperature processes lead to crystallization.

The crystallized areas can be etched with a high aspect ratio, resulting in extremely fine structures and vias, which makes FOTURAN II wafers a key component for use in semiconductor, chemical, industrial and biotech applications. After a second exposure and tempering process, the glass optionally can be transformed into a glass ceramic.

Due to its distinct characteristics, FOTURAN II is the material of choice for biotech related applications. Microfluidics, for instance, is on its way to becoming a mainstream enabling technology for a wide variety of fields including medical diagnostics, life science research, drug delivery and synthesis.

FOTURAN II is produced in a continuous melting process with optimal homogeneity, which ensures high reproducibility as well as improved and consistent quality with respect to photosensitivity. Standard supply forms for FOTURAN II include round 6- or 8-inch wafers and square substrates up to 200 x 200 mm in thicknesses ranging from 0.5 mm to 1 mm.

„In summary, FOTURAN II is a great complement to SCHOTT’s unique portfolio as one of the world’s leading suppliers of thin and ultra-thin glass wafers and substrates made of specialty materials”, explains Fredrik Prince, Head of the Strategic Business Field Thin Glass & Wafers.

Contact: Stefan Hermes, Schott AG
stefan.hermes@schott.com

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