Berliner Glas develops, designs and produces controllers for electrostatic chucks

The Berliner Glas Group has added controllers for electrostatic chucks (ESCs) to its product portfolio. The intelligent system controls improve the clamping and de-clamping performance of e-chucks considerably. The controllers enable the user to identify the optimal clamping voltage characteristics and to accurately hold the voltage. All necessary process parameters are determined with high precision and resolution and can be optimized according to customer requirements. The system provides control and full access to all essential parameters during wafer processing, making it possible to achieve an ideal clamping force. In addition, wafer charging is controlled and reduced which results in minimized particle generation and shorter release times.

The ESC controllers are based on a modular system and can be tailored to customer needs. Up to eight electrodes of an e-chuck can be actuated independently through a high voltage connector. Measurement and control of temperature can be done at up to four spots. The drivers have common CAN-BUS or EtherNet interfaces and can be run by machine control, a personal computer or as a stand-alone solution. The power supply is equipped with a far range power pack. Therefore, it is usable in all electric supply networks.

ESC controllers of the Berliner Glas Group are used in various areas of the semiconductor industry: in lithographic processes, inspection steps, coating, 3D integration, wafer handling and during etching processes. They are CE, RoHS and EMI certified, applicable by plug & play, have a short circuit and over voltage / current protection and can be inserted in a customized controller housing.

For more information please see the data sheet “ESC controller” or visit the website: http://www.berlinerglas.com/engineering-expertise/product-process-and-metrology-engineering/chuck-design.

Contact: Iris Teichmann, Berliner Glas KGaA Herbert Kubatz GmbH & Co.
Teichmann@berlinerglas.de