Smart development of thin films for power supply of tomorrow

Developing innovative sensors or microsystems, improving optical or magnetical data storages, combining and miniaturizing mechanical and electrical functions in MEMS or realizing superconducting systems for power transmission of tomorrow - thin film technology on nano- and micrometer scales is the key technology.

The compact R&D-coating system axplorer based on Pulsed Laser Deposition (PLD) opens up a wide range of materials to scientists and engineers for designing multilayer systems suitable for different applications. A fast and flexible change and combination of various coating materials is possible as well as coating on temperature sensitive materials. PLD uses laser light with high pulse energy and small wavelengths to ablate the target material for thin film deposition. Therefore PLD is a special technique within the class of physical vapour deposition techniques (PVD).

The use of an axplorer-system offers a lot of benefits for thin film development to users. This system features for example high flexibility concerning coating materials like oxides, nitrides, carbides, metals, semiconductors and polymers as well as concerning the substrate materials. An easy transfer of complex material stoichiometries and a high target yield of 80-95 % are further advantages. Moreover, the system affords the combination of various materials (functions) in multi-layer systems and  therefore turns out to be a compact plug-&-coat-system for R&D activities.

AxynTec Dünnschichttechnik GmbH
Dr. Marcus Kuhn
kuhn@axyntec.de
www.axyntec.de