Technical University Dortmund <br>Department of Intelligent Microsystems

4th NRW Nano-Conference

Goldsaalforum Stand 17

Contact person: Dr. Klaus Kallis
E-mail: klaus.kallis@tu-dortmund.de

the Institute of Intelligent Microsystems conducts research and development in the field of silicon-based micro sensor technology and actuator technology. Among other things, they develop circuits and CMOS process technology for microelectronic components and systems.

Services

concept and feasibility studies, prototype development, development of components and processes, simulation, consulting

General Information

Technical University Dortmund <br>Department of Intelligent Microsystems
Faculty of Electrical Engineering and Information Technology
Emil-Figge-Str. 68
44227 Dortmund
Germany

Contact

Prof. Horst Fiedler
+49 231 7553 203