Microelectromechanical piezoresistive MEMS probes

The CiS Research Institute develops various miniaturized probes of monocrystalline silicon with integrated piezoresistive measuring bridge for quick in-line inspection of components of different materials. High sampling rates are realized by very low contact force, a high natural frequency (3 ... 5 kHz) and a very small mass (≈0.1 mg). The measurement speed is up to 10 mm/s with a resolution in the vertical displacement of 2 nm and a sampling rate of 1600 Hz.

The robustness of the sensor to the effects of light and temperature changes, electromagnetics and against dust and process auxiliaries such as cutting oils allow the use under production conditions, e.g directly in the working area of work machine tools.

The MEMS micro switch is ideal for drilling and undercuts that cannot be measured with an AFM still a profilometer. The low contact force required also allows non-destructive measurement of components made of plastic, for example micro-optical structures.

The sensor closes the gap between an AFM and the classic stylus. The resolution is lower than in the AFM, but the measurement speed and range are much larger. The products can be supplied as a bare chip, circuit card with analog or digital output (test board) or as a custom set-ups.

Contact: Uta Neuhaus, CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH
uneuhaus@cismst.de